JPS6169268U - - Google Patents
Info
- Publication number
- JPS6169268U JPS6169268U JP15129284U JP15129284U JPS6169268U JP S6169268 U JPS6169268 U JP S6169268U JP 15129284 U JP15129284 U JP 15129284U JP 15129284 U JP15129284 U JP 15129284U JP S6169268 U JPS6169268 U JP S6169268U
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- objects
- deposited
- nozzle
- suction force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15129284U JPS6169268U (en]) | 1984-10-05 | 1984-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15129284U JPS6169268U (en]) | 1984-10-05 | 1984-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6169268U true JPS6169268U (en]) | 1986-05-12 |
Family
ID=30709411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15129284U Pending JPS6169268U (en]) | 1984-10-05 | 1984-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6169268U (en]) |
-
1984
- 1984-10-05 JP JP15129284U patent/JPS6169268U/ja active Pending